The XYR (Theta) alignment stages offer high precision and repeatability. The XYR-01-01 and XYR-01-02 stages feature ¡À7.5 mm of travel in the X and Y axes and ¡À180¡ã of rotation (theta). The stages feature linear resolutions of the X and Y axis of 0.25? (microsteps per step motor driver in use); the repeatability of each is 1.5?, positional accuracy is 5?, and backlash is 2?. The 1-mm per-turn ground lead screws and preloaded V-groove and crossed roller bearings add to the alignment stages¡¯ precision and stiffness. Each theta stage¡¯s resolution is 0.001¡ã (microsteps per step motor driver in use).
